Перегляд за автором "Dudin, S.V."

Сортувати за: Порядок: Результатів:

  • 2D fluid model for interactive development of ICP technological tools 
    Gapon, A.V.; Dahov, A.N.; Dudin, S.V.; Zykov, A.V.; Azarenkov, N.A. (Вопросы атомной науки и техники, 2006)
    The software for ICP device simulation is worked out. Discharge chamber geometry, RF power, pressure and working gas type are the input data. The results of calculation are inductor voltage, ion current density distribution ...
  • Actinometric study of oxygen dissociation in ICP source 
    Dakhov, A.N.; Dudin, S.V. (Вопросы атомной науки и техники, 2014)
    Results of actinometric study of oxygen dissociation in ICP source are presented. For atomic oxygen the emission lines of 844.6 nm was chosen having low impact of dissociative excitation. Actinometer gas in the experiments ...
  • Bone-like coatings deposition by using of modern pulsed ion-plasma technology 
    Zykova, A.V.; Dudin, S.V.; Polozhiy, K.I. (Вопросы атомной науки и техники, 2003)
    The technology of synthesis of multilayer coatings on the basis of alumina oxide and structures, like tricalcium phosphate and hydroxylapatite, was suggested by Reactive Ion-Beam Synthesis (RIBS) method in a same vacuum ...
  • Burning modes of a bipolar pulsed discharge in CO₂ 
    Lisovskiy, V.A.; Dudin, S.V.; Vusyk, M.M.; Yegorenkov, V.D. (Вопросы атомной науки и техники, 2020)
    We have studied the burning modes of the bipolar pulsed discharge in CO₂ within the frequency range between 20 and 300 kHz and the duty cycle of 11…97%. The current and voltage waveforms within the pressure range between ...
  • Control of reduced electric field in the positive column of a pulsed discharge in CO₂ 
    Lisovskiy, V.A.; Dudin, S.V.; Vusyk, M.M.; Osmayev, R.O.; Yegorenkov, V.D.; Platonov, P.P. (Problems of Atomic Science and Technology, 2023)
    The electric field strength in the positive column of dc and bipolar pulsed discharges in carbon dioxide was de-termined by the method of moving electrodes. It is shown that an increase in the frequency of the pulse voltage ...
  • Conversion of carbon dioxide in low-pressure plasma 
    Dudin, S.V.; Dakhov, A.N. (Вопросы атомной науки и техники, 2018)
    The paper reports the results of experimental study of efficiency of carbon dioxide conversion to CO and O₂ in gas-discharge plasma at low gas pressure. The inductively coupled plasma source operates at 13.56 MHz in the ...
  • DC gas breakdown and townsend discharge in CO₂ 
    Lisovskiy, V.A.; Dudin, S.V.; Platonov, P.P.; Yegorenkov, V.D. (Вопросы атомной науки и техники, 2020)
    We report the breakdown curves and current-voltage characteristics (CVC) of the Townsend mode DC discharge we have measured in carbon dioxide. We compare the breakdown curves measured with two different techniques. With ...
  • Dependence of RF breakdown curve on electrode geometry in CCP reactor 
    Dudin, S.V.; Dakhov, A.N.; Lisovskiy, V.A.; Pletniov, V.M. (Вопросы атомной науки и техники, 2012)
    The results of experimental and theoretical study of RF capacitively coupled discharge breakdown in reactor for reactive ion etching of semiconductors are presented. Taking into account complex geometry of the reactor with ...
  • Development of arc suppression technique for reactive magnetron sputtering 
    Dudin, S.V.; Farenik, V.I.; Dahov, A.N.; Walkowicz, J. (Физическая инженерия поверхности, 2005)
    The technique of arc suppression on the target surface of magnetron sputtering system during reactive deposition of Al₂O₃ coatings has been developed. Damping of arcs is achieved by transient polarity change of the ...
  • Experimental research of ICP reactor for plasma-chemical etching 
    Dudin, S.V.; Zykov, A.V.; Dahov, A.N.; Farenik, V.I. (Вопросы атомной науки и техники, 2006)
    The results of systematic experimental researches of plasma-chemical etching reactor in the inductive mode are presented in this paper. Measurements of the integral discharge parameters (inductor voltage, gas pressure, ...
  • Formation stages of pulsed discharge in oxygen and carbon tetrafluoride 
    Lisovskiy, V.A.; Ogloblina, P.A.; Dudin, S.V.; Yegorenkov, V.D.; Dakhov, A.N.; Farenik, V.I. (Журнал физики и инженерии поверхности, 2016)
    This paper reports the current and voltage oscilloscope waveforms of a pulsed discharge measured in a broad range of frequencies (from 20 to 300 kHz) and duty cycle from 0.15 to 0.85 for two values of oxygen and carbon ...
  • Forming a unipolar pulsed discharge in nitrogen 
    Lisovskiy, V.A.; Ogloblina, P.A.; Dudin, S.V.; Yegorenkov, V.D.; Dakhov, A.N. (Вопросы атомной науки и техники, 2016)
    This paper reports the current and voltage oscillograms of the pulsed discharge in the wide frequency range (from 20 to 300 kHz) with the duty cycle from 15 to 85 % for two values of the nitrogen pressure 0.1 and 1 Torr. ...
  • Glow discharge with a hollow cathode in carbon dioxide 
    Lisovskiy, V.A.; Dudin, S.V.; Platonov, P.P.; Osmayev, R.O.; Yegorenkov, V.D. (Problems of Atomic Science and Technology, 2022)
    This paper is devoted to an experimental study of the dc discharge with a hollow cathode within the carbon dioxide pressure range of 0.06…2 Torr. The registered CVCs in the pressure range below 0.5 Torr possess a hysteretic ...
  • Ignition and properties of RF capacitive discharge in acetylene 
    Lisovskiy, V.A.; Dudin, S.V.; Platonov, P.P.; Bogatyrenko, S.I.; Minenkov, A.A. (Вопросы атомной науки и техники, 2019)
    In the present work, we measured breakdown and extinction curves of radio-frequency discharge in acetylene as well as dependences of active current, power and gas pressure on the discharge burning time, and also optical ...
  • Influence of secondary electron emission on the RF gas breakdown 
    Dakhov, A.N.; Dudin, S.V. (Вопросы атомной науки и техники, 2013)
    The influence of the electron impact secondary electron emission on the RF gas breakdown has been researched experimentally and theoretically with use of particle-in-sell simulation. The experiments and simulations are ...
  • Influence of voltage pulse duration on ignition of glow discharge in air 
    Lisovskiy, V.A.; Platonov, P.P.; Dudin, S.V. (Вопросы атомной науки и техники, 2019)
    The effect of the duty cycle coefficient on the pulsed discharge ignition in air has been studied in experiment. It has been found that the highest breakdown voltage values are required for igniting the discharge with short ...
  • Integral cluster set-up for complex compound composites syntesis 
    Yakovin, S.D.; Dudin, S.V.; Zykov, A.V.; Farenik, V.I. (Вопросы атомной науки и техники, 2011)
    At present study the result of development and investigations of cluster technological set-up for synthesis of complex compound composites is demonstrated. The present set-up consist of complimentary DC-magnetron ...
  • Investigation of DC glow discharge in CO₂ using optical emission spectroscopy 
    Lisovskiy, V.A.; Krol, H.H.; Dudin, S.V. (Вопросы атомной науки и техники, 2018)
    The results of investigations of a glow discharge in carbon dioxide by the method of optical emission spectroscopy are presented. Processes in negative glow, positive column and anode glow are considered in detail. In ...
  • Langmuir probe in ion-beam plasma: theory VS experiment 
    Dudin, S.V. (Физическая инженерия поверхности, 2012)
    The paper is devoted to experimental verification of theoretical model of Langmuir probe operation in ion-beam plasma. The mathematical model of single cylindrical Langmuir probe describes dependence of ion current ...
  • Oxygen activation effect on reactive magnetron synthesis of alumina coatings 
    Walkowicz, J.; Zykov, A.V.; Dudin, S.V.; Yakovin, S.D. (Вопросы атомной науки и техники, 2007)
    The investigation results of the DC magnetron sputtering system for synthesis of high-quality oxide coatings are presented. In the system oxygen, activated by an independent Inductively-Coupled Plasma (ICP) source, is ...